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A fully automatic proximity aligner for mass
production which exposes the whole surface of a large substrate
at several-times by the proximity method. |
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A Programmable Step Variation enables free
panel arrangement for large glass substrate of the 5th
and the 6th generation. |
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By adopting a newly-developed optical system,
mask distortion correction mechanism, and a high-precision
thermo-regulation system, aligner has achieved high transcript
accuracy. |
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The high power mercury lamp and the high-speed
stage are adopted. |
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Low running cost |
