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Proximity Aligner for LCD

Proximity Aligner for Large LCD Substrates TME-550P/750P/950P

TME-950P

TME-950P

TME-550P

TME-550P

	A fully automatic proximity aligner for mass production which exposes the whole surface of a large substrate at once by the proximity method.
	A high transfer printing accuracy achieved through the adoption of a newly-developed lighting optical system, new flexure compensation mechanism and a high-precision thermo-regulation system.
	Substrate transfer, alignment and exposure can be implemented in an optimal sequence. We ensure high productivity and reliability through high throughput and 24-hour continuous operation.

<Major specifications>
	TME-550P	TME-750P	TME-950P
Exposure method	Proximity
Resolution	7 microns L&S (Different corresponding to the conditions)
Available substrate size	Max. 400 X 500 mm	Max. 650 X 750 mm	Max. 730 X 920 mm
Available mask size	Max. 450 X 550 mm	Max. 700 X 800 mm	Max. 800 X 960 mm
Illumination (365 nm)	30 mW / cm² (5 kW ultra-high-voltage mercury lamp)	25 mW / cm² (8 kW ultra-high-voltage mercury lamp)	23 mW / cm² (10 kW ultra-high-voltage mercury lamp)
Illumination unevenness	3.0% or less
Overlay accuracy	±1.0 microns
Gap setting range	50 to 300 microns	70 to 300 microns
Gap setting accuracy	±5 microns
Processing capacity	18 sec/piece or shorter (except for the exposure time)	18 sec/piece or shorter (except for the exposure time)	20 sec/piece or shorter (except for the exposure time)
Mask setting	Automatic
Dimensions of the system main unit	3600(W) X 2500(D) X 2600(H) mm	3600(W) X 3000(D) X 2950(H) mm	4200(W) X 3500(D) X 3300(H) mm
Weight of the system main unit	Approx. 4000 kg	Approx. 4000 kg	Approx. 5000 kg
Power supply	3-phase 200 V, 50/60 Hz